SU-8 3005 lift off ** only use metal tweezer **
Put sample in the first Remover PG bath for 2hrs at 80 deg. C
the Remover PG is labeled : NMP
Note: Use ceramic hot plate in PZT hood
Note: Based on your pattern shapes (if you pattern has lots of openings, then you can reduce first bath time to 1 hr)
(optional) sonication will help to remove SU8 residues between bath changes
* Note: You should be careful not to exceed total sonication time more than 85 s including this additional sonication time
* Note: Our Pt/Ti electrode will peel off after 85 s total sonication time
Put sample in the first Remover PG bath for 2hrs at 80 deg. C
Put sample in an IPA bath and rinse with IPA spraying
Final rinse with DI water and dry using N2 gun
by Xiaoyu Niu 08.23.2023