ADT 7100 Dicing Saw

System initialization

•  Turn the air valve in a vertical direction

•  Open the two water valves in counter-clockwise

•  Push the Power “ON” button on the machine

•  Wait for the initializing system

•  Select the “Administrator” and Enter the password “a” or Select the “ADT” and Put the password “adt”

•  If the system shows “yellow color” error, then Go to the “User” tab and Select “System Init”

Blade change

(Xiaoyu suggests you have to do this step because you can change blade and check the current blade info)

• Pull down the list of “Blade Info Workspace” and Select “Blade Info”

•  Click the "Change" button

•  Open the cover and Change the blade

•    * When you disassemble the blade, please use the black wrench with red top

•    * When you assemble the blade, please use the silver wrench

•    * If you don`t use proper tool, then the blade will be stuck to spindle...

• When you screw down the blade, anchor wrench is rotating counter clockwise.

• Ensure clean blade nut using wipe avoid the blade is stuck. 

•  Choose the right name of the blade in "Choose blade from list" and Click the “OK” button

•  Click the "Finish" button

•  The prompt "Close cover and click FINISH" will show up

•  Put safety clip to deceive machine to believe the cover is closed

•  Click the "Finish" button and then the machine will start to measure the actual height of the blade

•  Once this is done, the prompt "Blade Change Process Completed" will show up

•  Push the “Water Adj.” and Adjust the position of the water jet in a center of a rotating blade so that it splits half

  • There are 3 indicators indicating the current level of each item (Cut Water, Clean Jets, Spray Bars)

  • Cut Water ~ 1.44, Clean Jets ~ 0.33, Spray Bars ~ 0.48 (typical value)

•  Once this process is done, Press "Water Adj." button again to finish

•  Press "Blade Change" button again

•  Pull out the “Safety Clip” and Close the Blade chamber

•  Click the "Finish" button twice and the machine will start blade height measurement

Recipe preparation

• Original recipes are in template folder

• cut entry speed (6 - 12 mm/s, 12 mm/s for Si substrate)

• cut exit speed (6 - 12 mm/s, 12 mm/s for Si substrate)

• cutting speed (6 - 12 mm/s, 12 mm/s for Si substrate)

• go to "angle 0/1" or "angle 90/2" tab

• align type - > "manual"

• cut depth (height between blade and chuck): option 1 - 55 um means cut though into tap, because tape is only 75 um. option 2 - 150 um means leave 75 um at the bottom of wafer.

• cut index: distance between each cut

  • for GPC recipe: this is the only parameter we need to enter, because the recipe calculates cut number for us automatically.

  • for APC recipe: we need to enter cut index and cut number.

• cut length only for APC

• cut No. : only for APC

•  Click the "Video Workspace" button in the panel

•  Go to the “Auto” tab and Click the “Define job”

•  Select the Recipe and Click the “OK”

sample loading

•  Click the “Load Wafer” button in the panel

•    * If you cannot click the button, Click the “Video Workspace” button

•  Open the “Load-lock” chamber and Load the sample

•  Click the “Finish” button

•  Go to the “Spindle” and Right Click the icon and Check the “Operate”

Sample cutting

manul alignment

• click "manual align" button on the top

• "theta manul alignment": follow the instructions of the machine. You will get good result.

• once it is done, click "finish".

define cut position

• APC recipe: go to the first up right cut street, which is the cut starting point.

• GPC recipe: could be any cut street

• onece it is done, click "finish".

Performing Y offset 

• If you see the “Manual Y offset” message, then Click the “yes”. If you didn't see this message, click the button on the top. (Xiaoyu suggests have to do this step. If not, usually cause problems.)

• Go to the dummy area and Click the "Next"

• Once a single cut is done, then Place the Reticle of the crosshair in the center of the real cut

• Click the "Finish" button

wafer full cut

• click "wafer full cut" button on the top

sample unloading

• Once the cutting is done, Push the “Unload Wafer” button and Unload the sample

• Click the “Finish”

• Go to the “User” tab and Click the “Exit”

• Push the “Stop” button

• Close all valves

system shutting down

• close the software

• close wafer valves

• close air valves

• close power button of the film station

you can leave now :)

tips

1.  measure feature size
   If we don't know the size of our pattern, we can measure that at the "alignment" step. Click "x" or "y" button. That becomes to zero. Move to next pattern. We are able to know the size.

2. measure cutting width

we can drag the blue rectangle and let it fit for our cutting street. 

3. S3530 means…

35 means 3.5 mils (88.9um) which is the thickness of the blade

30 means 30mils (762um) which are blade height or exposure

Q3560 blade means

35 means 3.5 miles (88.9um) which is the thickness of the blade

60 means 60mils (1524um) which are blade height or exposure

4. + marks : Camera position

X marks : Blade position